Class 100 clean room FFU construction technology, requirements and process


The clean room cleanliness grades are: tenth grade, hundredth grade, thousandth grade, ten thousandth grade, one hundred thousandth grade, three hundred thousandth grade and other statics. Class 100 clean rooms are mostly used in industries such as LED electronics and pharmaceuticals. Here we will focus on the design of FFU fan filter units used in GMP class 100 clean rooms.
1. FFU construction technology of class 100 clean room
The maintenance structure of the clean room is generally made of metal wall panels. Generally, after the completion, the layout cannot be changed at will. However, due to the continuous update of the production process, the cleanliness layout of the original clean room workshop cannot meet the needs of the new process, resulting in clean room Clean workshops need to be changed frequently due to product replacement, which wastes a lot of financial and material resources.
If the number of FFU purification units is increased or decreased, the cleanliness layout of the room can be partially adjusted to meet the process changes, and the FFU purification unit has its own power, tuyere, and lamps, which can save a lot of investment. It is almost impossible to achieve the same effect for the purification system with centralized air supply.
2. Design scheme of FFU fan filter unit for class 100 clean room
1. The ceiling of the 100-level area is covered with FFU fan purification units.
2. The clean air enters the elevated floor from the lower part of the side wall of the 100-level area or enters the vertical air duct, enters the static pressure box through the vertical air duct, and is sent into the room through the FFU fan purification unit to achieve circulation.
3. The upper FFU fan purification unit in the 100-class area supplies air vertically, and the leakage between the FFU fan purification unit and the hanger in the 100-class area flows from the room to the static pressure box, which has little impact on the cleanliness of the 100-class area.
4. The FFU fan purification unit is light in weight and adopts a cover-in installation method, which makes installation, filter replacement and maintenance more convenient.
5. Shorten the construction period. The FFU fan filter unit system saves significant energy, thereby solving the shortcomings of centralized air supply such as the large air-conditioning machine room and the high operating cost of the air-conditioning unit. Disadvantages that the process should not be adjusted.
6. The use of the FFU circulation system in the clean room not only saves operating space, has high cleanliness and safety, and low operating costs, but also has high operational flexibility. The system can be upgraded and adjusted at any time without affecting production. To better meet the needs of the clean room, the use of FFU circulation systems in semiconductor or other manufacturing industries has gradually become the most important clean design solution.
Three, HEPA filter installation conditions
1. Before installing the high-efficiency filter, the clean room must be fully cleaned and wiped. If there is dust in the air-conditioning system, it should be cleaned and wiped again to meet the cleanliness requirements. If a high-efficiency filter is installed in the technical interlayer or suspended ceiling, the technical interlayer or suspended ceiling should also be thoroughly cleaned and wiped.
2. The clean room must be airtight during installation. After the FFU is installed and started to operate, the purification air conditioner must be tested and run continuously for more than 12 hours. After cleaning and wiping the clean room again, install the high-efficiency filter immediately.
3. Keep the clean room clean and free of dust. All keels have been installed and levelled.
4. Installers must be equipped with clean clothes and gloves to prevent artificial pollution of the box and filter.
5. In order to ensure the long-term effective work of the high-efficiency filter, the installation environment should not be in oily smoke, dusty and humid air. The filter should try to avoid contact with water or other corrosive liquids, so as not to affect its use effect.
6. It is recommended that the number of installers in each group is 6.
4. Precautions for unloading and handling
1. FFU and high-efficiency filters have been packaged with multiple protections when they leave the factory. Please use a forklift to unload the entire pallet when unloading. When unloading the goods, the goods should be prevented from dumping, and severe vibration and collision should be avoided.
2. After the equipment is unloaded, it should be placed in a dry and ventilated room for temporary storage. If it can only be stored outdoors, it should be covered with a tarpaulin to avoid rain and water.
3. Since the high-efficiency filter uses ultra-fine glass fiber filter paper, the filter material is easily broken and damaged, resulting in particle leakage. Therefore, the filter must not be dumped or crushed during unpacking and handling to prevent severe vibration and collision.
4. When taking out the high-efficiency filter, it is forbidden to use a knife or sharp object to cut the packaging bag, so as not to scratch the filter paper.
5. Each high-efficiency filter should be carried by two people. The operator must wear gloves. The process must be handled with care. Hold the frame of the filter with both hands. It is forbidden to hold the filter protection net with your hands, and it is forbidden to touch the filter paper with sharp objects. Do not distort the filter.
6. Filters should not be placed in layers, they should be arranged horizontally and orderly, placed neatly against the wall in the installation and waiting for installation.
5. Precautions for installation of FFU high-efficiency filter
1. Before installing the high-efficiency filter, it is necessary to check the appearance of the filter, including whether the filter paper, sealing gasket, and frame are damaged, whether the size and technical performance meet the design requirements, and the filter screen with serious damage to the appearance or filter paper should be prohibited. Install, take photos and report to the manufacturer for processing.
2. Only hold the frame of the filter when installing, and handle it with care. Avoid violent vibration and collision, and strictly prohibit the installer’s fingers or other tools from touching the filter paper inside the filter.
3. Pay attention to the direction when installing the filter, so that the arrow on the frame of the filter faces outward, that is, the arrow on the outer frame should be consistent with the direction of airflow.
4. Do not step on the filter protection net during the installation process, and prohibit debris from being discarded on the filter surface. It is forbidden to step on the filter protection net.
5. Other installation precautions: You must wear gloves, and pay attention to the box cutting your fingers. The FFU installation should be aligned with the filter, the edge of the FFU box should not be pressed on the filter, and it is forbidden to cover the FFU with objects; it is forbidden to step on the FFU air inlet ring.
6. Installation process of FFU filter in class 100 clean room
1. Carefully take out the high-efficiency filter from the shipping box, and check whether any parts are damaged during the shipping process. Remove the plastic packaging bag, and place the FFU and high-efficiency filter in a clean room.
2. Install the FFU and high-efficiency filter on the ceiling keel. At least 2 people prepare on the suspended ceiling where the FFU is to be installed. One person transports the FFU box to the keel of the installation location, and another 2 people on the ladder lift the box. The box is 45 degrees from the ceiling and passes through the ceiling. Two people on the suspended ceiling should hold the handle of the FFU, take over the FFU box and lay it flat on the nearby suspended ceiling to wait for the filter to be covered.
3. Two people on the ladder took the high-efficiency filter handed over by the porter, held the frame of the high-efficiency filter with both hands, at an angle of 45 degrees to the ceiling, and passed through the ceiling. Handle with care during the process, and it is forbidden to touch the surface of the filter. Two people on the suspended ceiling take over the high-efficiency filter, align it with the four sides of the keel and put it down in parallel. Pay attention to the wind direction of the filter, and the air outlet side should face downward.
4. Align the FFU box around the filter and put it down. Handle it gently during the process. Be careful not to let the edge of the box touch the filter. According to the circuit diagram provided by the manufacturer and the buyer’s electrical regulations, use a cable to connect the fan unit to a power supply of appropriate voltage. superior. The system control lines are connected by groups according to the group plan provided by China Construction South.
7. FFU strong and weak current installation requirements and procedures.


1. In terms of strong electricity: the input power is single-phase 220V AC power supply (live wire, ground wire, neutral wire), and the maximum current of each FFU is 1.7A. It is recommended that each main power line be connected to 8 FFUs, and the main power line should use 2.5 square millimeter copper core wires. Finally, the first FF can use 15A plugs and sockets to connect to the strong current bridge. If each FFU needs to be connected to a socket, a copper core wire of 1.5 square millimeters can be used.
2. In terms of weak current: the connection between the FFU collector and the FFU, and the connection between the FFUs are all connected by network cables. The network cable requires AMP Category 6 or Super Category 6 shielded cable, and the crystal head is AMP shielded crystal head. The pressing order of the network cable from left to right is orange white, orange, blue white, blue, green white, green, brown white, brown. The network cable is pressed into a parallel network cable, and the order of pressing the crystal heads at both ends is the same from left to right. When pressing the network cable, please pay attention to fully contact the aluminum thin in the network cable with the metal part of the crystal head to achieve the shielding effect.
3. Precautions in the process of connecting the power cord and network cable. In order to secure the strong electrical connection, single-core copper wires must be selected, and there should be no exposed parts after the wires are inserted into the connecting terminals. In order to prevent leakage and reduce the impact on data transmission, FFU must be grounded. Each group must be a separate network cable, groups cannot be mixed, and the last group of FFUs in each area cannot be connected to FFUs in other areas. The FFUs in each group must be connected in sequence according to the address numbers to facilitate FFU fault checking, for example.
4. Do not use brute force when installing the power cord and network cable. The power cord and network cable should be fixed to prevent them from being kicked off during construction; when routing strong and weak current lines, try to avoid parallel routing, and the parallel routing is too long The spacing should also be more than 600mm to reduce interference; it is forbidden to have too long network cables and bundle them with power cables.
5. Pay attention to the protection of FFU and filter in the related construction on the inter-layer, keep the surface of the box body clean, and pay attention to prevent FFU from entering water to avoid damage to the fan. When connecting the FFU power cord, power-off operation should be performed to prevent electric shock due to leakage; all FFUs must be short-circuit tested after the power cord is connected, and the power switch can only be turned on after the test is passed; when replacing the filter, the power must be turned off before replacement.


Post time: Nov-28-2022